4. Chemistry: electrical and wave energy
  5. Processes and products
  6. Coating, forming or etching by sputtering

Symmorphix, Inc.

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Dielectric barrier layer films

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Dielectric barrier layer films

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Energy conversion and storage films and devices by physical...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Method of producing amorphous silicon for hard mask and...

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Planar optical devices and methods for their manufacture

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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