Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2007-08-28
2007-08-28
Pert, Evan (Department: 2826)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S627000, C438S958000, C257SE21170
Reexamination Certificate
active
11228805
ABSTRACT:
In accordance with the present invention, a dielectric barrier layer is presented. A barrier layer according to the present invention includes a densified amorphous dielectric layer deposited on a substrate by pulsed-DC, substrate biased physical vapor deposition, wherein the densified amorphous dielectric layer is a barrier layer. A method of forming a barrier layer according to the present inventions includes providing a substrate and depositing a highly densified, amorphous, dielectric material over the substrate in a pulsed-dc, biased, wide target physical vapor deposition process. Further, the process can include performing a soft-metal breath treatment on the substrate. Such barrier layers can be utilized as electrical layers, optical layers, immunological layers, or tribological layers.
REFERENCES:
patent: 3309302 (1967-03-01), Heil
patent: 3616403 (1971-10-01), Collins et al.
patent: 3850604 (1974-11-01), Klein
patent: 4082569 (1978-04-01), Evans, Jr.
patent: 4111523 (1978-09-01), Kaminow et al.
patent: 4437966 (1984-03-01), Hope et al.
patent: 4587225 (1986-05-01), Tsukuma et al.
patent: 4619680 (1986-10-01), Nourshargh et al.
patent: RE32449 (1987-06-01), Claussen
patent: 4710940 (1987-12-01), Sipes, Jr.
patent: 4785459 (1988-11-01), Baer
patent: 4915810 (1990-04-01), Kestigian et al.
patent: 4978437 (1990-12-01), Wirz
patent: 5085904 (1992-02-01), Deak et al.
patent: 5107538 (1992-04-01), Benton et al.
patent: 5110696 (1992-05-01), Shokoohi et al.
patent: 5119460 (1992-06-01), Bruce et al.
patent: 5173271 (1992-12-01), Chen et al.
patent: 5174876 (1992-12-01), Buchal et al.
patent: 5196041 (1993-03-01), Tumminelli et al.
patent: 5200029 (1993-04-01), Bruce et al.
patent: 5206925 (1993-04-01), Nakazawa et al.
patent: 5225288 (1993-07-01), Beeson et al.
patent: 5237439 (1993-08-01), Misono et al.
patent: 5252194 (1993-10-01), Demaray et al.
patent: 5287427 (1994-02-01), Atkins et al.
patent: 5296089 (1994-03-01), Chen et al.
patent: 5303319 (1994-04-01), Ford et al.
patent: 5306569 (1994-04-01), Hiraki
patent: 5309302 (1994-05-01), Vollmann
patent: 5338625 (1994-08-01), Bates et al.
patent: 5355089 (1994-10-01), Treger
patent: 5381262 (1995-01-01), Arima et al.
patent: 5427669 (1995-06-01), Drummond
patent: 5435826 (1995-07-01), Sakakibara et al.
patent: 5457569 (1995-10-01), Liou et al.
patent: 5472795 (1995-12-01), Atita
patent: 5475528 (1995-12-01), LaBorde
patent: 5478456 (1995-12-01), Humpal et al.
patent: 5483613 (1996-01-01), Bruce et al.
patent: 5499207 (1996-03-01), Miki et al.
patent: 5512147 (1996-04-01), Bates et al.
patent: 5538796 (1996-07-01), Schaffer et al.
patent: 5555127 (1996-09-01), Abdelkader et al.
patent: 5561004 (1996-10-01), Bates et al.
patent: 5563979 (1996-10-01), Bruce et al.
patent: 5565071 (1996-10-01), Demaray et al.
patent: 5569520 (1996-10-01), Bates
patent: 5591520 (1997-01-01), Migliorini et al.
patent: 5597660 (1997-01-01), Bates et al.
patent: 5603816 (1997-02-01), Demaray et al.
patent: 5607560 (1997-03-01), Hirabayashi et al.
patent: 5607789 (1997-03-01), Treger et al.
patent: 5612152 (1997-03-01), Bates
patent: 5613995 (1997-03-01), Bhandarkar et al.
patent: 5645626 (1997-07-01), Edlund et al.
patent: 5654054 (1997-08-01), Tropsha et al.
patent: 5654984 (1997-08-01), Hershbarger et al.
patent: 5686360 (1997-11-01), Harvey, III et al.
patent: 5689522 (1997-11-01), Beach
patent: 5693956 (1997-12-01), Shi et al.
patent: 5702829 (1997-12-01), Paidassi et al.
patent: 5718813 (1998-02-01), Drummond
patent: 5719976 (1998-02-01), Henry et al.
patent: 5731661 (1998-03-01), So et al.
patent: 5738731 (1998-04-01), Shindo et al.
patent: 5755938 (1998-05-01), Fukui et al.
patent: 5757126 (1998-05-01), Harvey, III et al.
patent: 5762768 (1998-06-01), Goy et al.
patent: 5771562 (1998-06-01), Harvey, III et al.
patent: 5792550 (1998-08-01), Phillips et al.
patent: 5811177 (1998-09-01), Shi et al.
patent: 5814195 (1998-09-01), Lehan et al.
patent: 5830330 (1998-11-01), Lantsman
patent: 5831262 (1998-11-01), Greywall et al.
patent: 5841931 (1998-11-01), Foresi et al.
patent: 5847865 (1998-12-01), Gopinath et al.
patent: 5849163 (1998-12-01), Ichikawa et al.
patent: 5853830 (1998-12-01), McCaulley et al.
patent: 5855744 (1999-01-01), Halsey et al.
patent: 5870273 (1999-02-01), Sogabe et al.
patent: 5882946 (1999-03-01), Otani
patent: 5900057 (1999-05-01), Buchal et al.
patent: 5909346 (1999-06-01), Malhotra et al.
patent: 5930046 (1999-07-01), Solberg et al.
patent: 5930584 (1999-07-01), Sun et al.
patent: 5942089 (1999-08-01), Sproul et al.
patent: 5948215 (1999-09-01), Lantsman
patent: 5952778 (1999-09-01), Haskal et al.
patent: 5961682 (1999-10-01), Lee et al.
patent: 5966491 (1999-10-01), DiGiovanni
patent: 5977582 (1999-11-01), Fleming et al.
patent: 6000603 (1999-12-01), Koskenmaki et al.
patent: 6001224 (1999-12-01), Drummond et al.
patent: 6004660 (1999-12-01), Topolski et al.
patent: 6024844 (2000-02-01), Drummond et al.
patent: 6045626 (2000-04-01), Yano et al.
patent: 6046081 (2000-04-01), Kuo
patent: 6051114 (2000-04-01), Yao et al.
patent: 6051296 (2000-04-01), McCaulley et al.
patent: 6052397 (2000-04-01), Jeon et al.
patent: 6057557 (2000-05-01), Ichikawa
patent: 6058233 (2000-05-01), Dragone
patent: 6071323 (2000-06-01), Kawaguchi
patent: 6077642 (2000-06-01), Ogata et al.
patent: 6080643 (2000-06-01), Noguchi et al.
patent: 6093944 (2000-07-01), VanDover
patent: 6106933 (2000-08-01), Nagai et al.
patent: 6117279 (2000-09-01), Smolanoff et al.
patent: 6133670 (2000-10-01), Rodgers et al.
patent: 6146225 (2000-11-01), Sheats et al.
patent: 6157765 (2000-12-01), Bruce et al.
patent: 6162709 (2000-12-01), Raoux et al.
patent: 6165566 (2000-12-01), Tropsha
patent: 6168884 (2001-01-01), Neudecker et al.
patent: 6176986 (2001-01-01), Watanabe et al.
patent: 6197167 (2001-03-01), Tanaka
patent: 6198217 (2001-03-01), Suzuki et al.
patent: 6204111 (2001-03-01), Uemoto et al.
patent: 6210544 (2001-04-01), Sasaki
patent: 6214660 (2001-04-01), Uemoto et al.
patent: 6232242 (2001-05-01), Hata et al.
patent: 6236793 (2001-05-01), Lawrence et al.
patent: 6242129 (2001-06-01), Johnson
patent: 6242132 (2001-06-01), Neudecker et al.
patent: 6248291 (2001-06-01), Nakagama et al.
patent: 6248640 (2001-06-01), Nam
patent: 6261917 (2001-07-01), Quek et al.
patent: 6268695 (2001-07-01), Affinito
patent: 6280585 (2001-08-01), Obinata et al.
patent: 6280875 (2001-08-01), Kwak et al.
patent: 6281142 (2001-08-01), Basceri et al.
patent: 6287986 (2001-09-01), Mihara
patent: 6290821 (2001-09-01), McLeod
patent: 6290822 (2001-09-01), Fleming et al.
patent: 6300215 (2001-10-01), Shin
patent: 6302939 (2001-10-01), Rabin et al.
patent: 6306265 (2001-10-01), Fu et al.
patent: 6344419 (2002-02-01), Forster et al.
patent: 6350353 (2002-02-01), Gopalraja et al.
patent: 6356694 (2002-03-01), Weber
patent: 6358810 (2002-03-01), Dornfest et al.
patent: 6361662 (2002-03-01), Chiba et al.
patent: 6365300 (2002-04-01), Ota et al.
patent: 6365319 (2002-04-01), Heath et al.
patent: 6376027 (2002-04-01), Lee et al.
patent: 6379835 (2002-04-01), Kucherovsky et al.
patent: 6391166 (2002-05-01), Wang
patent: 6409965 (2002-06-01), Nagata et al.
patent: 6413382 (2002-07-01), Wang et al.
patent: 6413645 (2002-07-01), Graff et al.
patent: 6416598 (2002-07-01), Sircar
patent: 6423776 (2002-07-01), Akkapeddi et al.
patent: 6433380 (2002-08-01), Shin
patent: 6444750 (2002-09-01), Touhsaent
patent: 6488822 (2002-12-01), Moslehi
patent: 6497598 (2002-12-01), Affinito
patent: 6506289 (2003-01-01), Demaray et al.
patent: 6511615 (2003-01-01), Dawes et al.
patent: 6522067 (2003-02-01), Graff et al.
patent: 6533907 (2003-03-01), Demaray et al.
patent: 6537428 (2003-03-01), Xiong et al.
patent: 6558836 (2003-05-01), Whitacre et al.
patent: 6563998 (2003-05-01), Farah et al.
patent: 6570325 (2003-05-01), Graff et al.
patent: 6576546 (2003-06-01), Gilbert et al.
patent: 6602338 (2003-08-01), Chen et al.
patent: 6605228 (2003-08-01), Kawaguchi et al.
patent: 6615614 (2003-09-01), Makikawa et al.
patent: 6632563 (2003-10-01), Krasnov et al.
patent: 6673716 (2004-01-01), D'Couto et al.
patent: 6
Brooks Peter
Demaray Richard E.
Narasimhan Mukundan
Finnegan Henderson Farabow Garrett & Dunner L.L.P.
Mandala Jr. Victor A.
Pert Evan
Symmorphix, Inc.
LandOfFree
Dielectric barrier layer films does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Dielectric barrier layer films, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Dielectric barrier layer films will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3852801