Dielectric barrier layer films

Details Dielectric barrier layer films Dielectric barrier layer films

2007-04-17

2007-04-17

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C257S635000, C257SE21040

Reexamination Certificate

active

10789953

ABSTRACT:
In accordance with the present invention, a dielectric barrier layer is presented. A barrier layer according to the present invention includes a densified amorphous dielectric layer deposited on a substrate by pulsed-DC, substrate biased physical vapor deposition, wherein the densified amorphous dielectric layer is a barrier layer. A method of forming a barrier layer according to the present inventions includes providing a substrate and depositing a highly densified, amorphous, dielectric material over the substrate in a pulsed-dc, biased, wide target physical vapor deposition process. Further, the process can include performing a soft-metal breath treatment on the substrate. Such barrier layers can be utilized as electrical layers, optical layers, immunological layers, or tribological layers.

REFERENCES:
patent: 3309302 (1967-03-01), Heil
patent: 3616403 (1971-10-01), Collins et al.
patent: 3850604 (1974-11-01), Klein
patent: 4082569 (1978-04-01), Evans, Jr.
patent: 4111523 (1978-09-01), Kaminow et al.
patent: 4437966 (1984-03-01), Hope et al.
patent: 4587225 (1986-05-01), Tsukuma et al.
patent: 4619680 (1986-10-01), Nourshargh et al.
patent: RE32449 (1987-06-01), Claussen
patent: 4710940 (1987-12-01), Sipes, Jr.
patent: 4785459 (1988-11-01), Baer
patent: 4915810 (1990-04-01), Kestigian et al.
patent: 4978437 (1990-12-01), Wirz
patent: 5085904 (1992-02-01), Deak et al.
patent: 5107538 (1992-04-01), Benton et al.
patent: 5110696 (1992-05-01), Shokoohi et al.
patent: 5119460 (1992-06-01), Bruce et al.
patent: 5173271 (1992-12-01), Chen et al.
patent: 5174876 (1992-12-01), Buchal et al.
patent: 5196041 (1993-03-01), Tumminelli et al.
patent: 5200029 (1993-04-01), Bruce et al.
patent: 5206925 (1993-04-01), Nakazawa et al.
patent: 5225288 (1993-07-01), Beeson et al.
patent: 5237439 (1993-08-01), Misono et al.
patent: 5252194 (1993-10-01), Demaray et al.
patent: 5287427 (1994-02-01), Atkins et al.
patent: 5296089 (1994-03-01), Chen et al.
patent: 5303319 (1994-04-01), Ford et al.
patent: 5306569 (1994-04-01), Hiraki
patent: 5309302 (1994-05-01), Vollmann
patent: 5338625 (1994-08-01), Bates et al.
patent: 5355089 (1994-10-01), Treger
patent: 5381262 (1995-01-01), Arima et al.
patent: 5427669 (1995-06-01), Drummond
patent: 5435826 (1995-07-01), Sakakibara et al.
patent: 5457569 (1995-10-01), Liou et al.
patent: 5472795 (1995-12-01), Atita
patent: 5475528 (1995-12-01), LaBorde
patent: 5478456 (1995-12-01), Humpal et al.
patent: 5483613 (1996-01-01), Bruce et al.
patent: 5499207 (1996-03-01), Miki et al.
patent: 5512147 (1996-04-01), Bates et al.
patent: 5538796 (1996-07-01), Schaffer et al.
patent: 5555127 (1996-09-01), Abdelkader et al.
patent: 5561004 (1996-10-01), Bates et al.
patent: 5563979 (1996-10-01), Bruce et al.
patent: 5565071 (1996-10-01), Demaray et al.
patent: 5569520 (1996-10-01), Bates
patent: 5591520 (1997-01-01), Migliorini et al.
patent: 5597660 (1997-01-01), Bates et al.
patent: 5603816 (1997-02-01), Demaray et al.
patent: 5607560 (1997-03-01), Hirabayashi et al.
patent: 5607789 (1997-03-01), Treger et al.
patent: 5612152 (1997-03-01), Bates
patent: 5613995 (1997-03-01), Bhandarkar et al.
patent: 5645626 (1997-07-01), Edlund et al.
patent: 5654054 (1997-08-01), Tropsha et al.
patent: 5654984 (1997-08-01), Hershbarger et al.
patent: 5686360 (1997-11-01), Harvey, III et al.
patent: 5689522 (1997-11-01), Beach
patent: 5693956 (1997-12-01), Shi et al.
patent: 5702829 (1997-12-01), Paidassi et al.
patent: 5718813 (1998-02-01), Drummond
patent: 5719976 (1998-02-01), Henry et al.
patent: 5731661 (1998-03-01), So et al.
patent: 5738731 (1998-04-01), Shindo et al.
patent: 5755938 (1998-05-01), Fukui et al.
patent: 5757126 (1998-05-01), Harvey, III et al.
patent: 5762768 (1998-06-01), Goy et al.
patent: 5771562 (1998-06-01), Harvey, III et al.
patent: 5792550 (1998-08-01), Phillips et al.
patent: 5811177 (1998-09-01), Shi et al.
patent: 5814195 (1998-09-01), Lehan et al.
patent: 5830330 (1998-11-01), Lantsman
patent: 5831262 (1998-11-01), Greywall et al.
patent: 5841931 (1998-11-01), Foresi et al.
patent: 5847865 (1998-12-01), Gopinath et al.
patent: 5849163 (1998-12-01), Ichikawa et al.
patent: 5853830 (1998-12-01), McCaulley et al.
patent: 5855744 (1999-01-01), Halsey et al.
patent: 5870273 (1999-02-01), Sogabe et al.
patent: 5882946 (1999-03-01), Otani
patent: 5900057 (1999-05-01), Buchal et al.
patent: 5909346 (1999-06-01), Malhotra et al.
patent: 5930046 (1999-07-01), Solberg et al.
patent: 5930584 (1999-07-01), Sun et al.
patent: 5942089 (1999-08-01), Sproul et al.
patent: 5948215 (1999-09-01), Lantsman
patent: 5952778 (1999-09-01), Haskal et al.
patent: 5961682 (1999-10-01), Lee et al.
patent: 5966491 (1999-10-01), DiGiovanni
patent: 5977582 (1999-11-01), Fleming et al.
patent: 6000603 (1999-12-01), Koskenmaki et al.
patent: 6001224 (1999-12-01), Drummond
patent: 6004660 (1999-12-01), Topolski et al.
patent: 6024844 (2000-02-01), Drummond et al.
patent: 6045626 (2000-04-01), Yano et al.
patent: 6046081 (2000-04-01), Kuo
patent: 6051114 (2000-04-01), Yao et al.
patent: 6051296 (2000-04-01), McCaulley et al.
patent: 6052397 (2000-04-01), Jeon et al.
patent: 6057557 (2000-05-01), Ichikawa
patent: 6058233 (2000-05-01), Dragone
patent: 6071323 (2000-06-01), Kawaguchi
patent: 6077642 (2000-06-01), Ogata et al.
patent: 6080643 (2000-06-01), Noguchi et al.
patent: 6093944 (2000-07-01), VanDover
patent: 6106933 (2000-08-01), Nagai et al.
patent: 6117279 (2000-09-01), Smolanoff et al.
patent: 6133670 (2000-10-01), Rodgers et al.
patent: 6146225 (2000-11-01), Sheats et al.
patent: 6157765 (2000-12-01), Bruce et al.
patent: 6162709 (2000-12-01), Raux et al.
patent: 6165566 (2000-12-01), Tropsha
patent: 6168884 (2001-01-01), Neudecker et al.
patent: 6176986 (2001-01-01), Watanabe et al.
patent: 6197167 (2001-03-01), Tanaka
patent: 6198217 (2001-03-01), Suzuki et al.
patent: 6204111 (2001-03-01), Uemoto et al.
patent: 6210544 (2001-04-01), Sasaki
patent: 6214660 (2001-04-01), Uemoto et al.
patent: 6232242 (2001-05-01), Hata et al.
patent: 6236793 (2001-05-01), Lawrence et al.
patent: 6242129 (2001-06-01), Johnson
patent: 6242132 (2001-06-01), Neudecker et al.
patent: 6248291 (2001-06-01), Nakagama et al.
patent: 6248640 (2001-06-01), Nam
patent: 6261917 (2001-07-01), Quek et al.
patent: 6268695 (2001-07-01), Affinito
patent: 6280585 (2001-08-01), Obinata et al.
patent: 6280875 (2001-08-01), Kwak et al.
patent: 6281142 (2001-08-01), Basceri et al.
patent: 6287986 (2001-09-01), Mihara
patent: 6290821 (2001-09-01), McLeod
patent: 6290822 (2001-09-01), Fleming et al.
patent: 6300215 (2001-10-01), Shin
patent: 6302939 (2001-10-01), Rabin et al.
patent: 6306265 (2001-10-01), Fu et al.
patent: 6344419 (2002-02-01), Forster et al.
patent: 6350353 (2002-02-01), Gopalraja et al.
patent: 6356694 (2002-03-01), Weber
patent: 6358810 (2002-03-01), Dornfest et al.
patent: 6361662 (2002-03-01), Chiba et al.
patent: 6365300 (2002-04-01), Ota et al.
patent: 6365319 (2002-04-01), Heath et al.
patent: 6376027 (2002-04-01), Lee et al.
patent: 6379635 (2002-04-01), Kucherovsky et al.
patent: 6409965 (2002-06-01), Nagate et al.
patent: 6413382 (2002-07-01), Wang et al.
patent: 6413645 (2002-07-01), Graff et al.
patent: 6416598 (2002-07-01), Sircar
patent: 6423776 (2002-07-01), Akkapeddi et al.
patent: 6433380 (2002-08-01), Shin
patent: 6444104 (2002-09-01), Gopalraja et al.
patent: 6444750 (2002-09-01), Touhsaent
patent: 6488822 (2002-12-01), Moslehi
patent: 6497598 (2002-12-01), Affinito
patent: 6506289 (2003-01-01), Demaray et al.
patent: 6511615 (2003-01-01), Dawes et al.
patent: 6522067 (2003-02-01), Graff et al.
patent: 6533907 (2003-03-01), Demaray et al.
patent: 6537428 (2003-03-01), Xiong et al.
patent: 6558836 (2003-05-01), Whitacre et al.
patent: 6563998 (2003-05-01), Farah et al.
patent: 6570325 (2003-05-01), Graff et al.
patent: 6576546 (2003-06-01), Gilbert et al.
patent: 6602338 (2003-08-01), Chen et al.
patent: 6605228 (2003-08-01), Kawaguchi et al.
patent: 6615614 (2003-09-01), Makikawa et al.
patent: 6632563 (2003-10-01), Krasnov et al.
patent: 6673716 (2004-01-01), D'Couto et al.
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