4. Coating processes
  5. Direct application of electrical, magnetic, wave, or...
  6. Plasma

Sunil Wickramanayaka

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Device for fixing a gas showerhead or target plate to an...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Electrostatic chuck device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Electrostatic chuck device

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate

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Method of depositing a higher permittivity dielectric film

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Methods of depositing films on polymer substrates

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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Profile ID: LFUS-PAI-P-1284951

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