4. Abrading
  5. Machine
  6. Rotary tool

Sumitomo Mitsubishi Silicon Corporation

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Apparatus and method for pulling single crystal

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Apparatus and method for supplying Crystalline materials in...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Apparatus for manufacturing silicon single crystal, method...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Processes of growth from liquid or supercritical state – Having pulling during growth
Reexamination Certificate

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Apparatus for manufacturing silicon single crystal, method...

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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Apparatus for supplying raw material

Single-crystal – oriented-crystal – and epitaxy growth processes; – Apparatus
Reexamination Certificate

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