4. Single-crystal, oriented-crystal, and epitaxy growth processes;
  5. Forming from vapor or gaseous state
  6. With decomposition of a precursor

Subhash B. Kulkarni

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Method to achieve increased trench depth, independent of CD...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Method to achieve increased trench depth, independent of CD...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
Reexamination Certificate

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Method to fill deep trench structures with void-free...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Optimum reduced pressure epitaxial growth process to prevent aut

Metal treatment – Process of modifying or maintaining internal physical... – Chemical-heat removing or burning of metal
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Process of manufacturing silicon-on-insulator chip having an...

Semiconductor device manufacturing: process – Semiconductor substrate dicing – Having specified scribe region structure
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Profile ID: LFUS-PAI-P-127005

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