4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Su-Chen Lai

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Chemical mechanical polishing (CMP) method for gate last...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Fabricating method of gate structure

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Gate structure

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Charge transfer device
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Method for a gate last process

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method for forming a bottle-shaped trench

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-2232263

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