4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Stephen P. DeOrnellas

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Cobalt silicide etch process and apparatus

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Cobalt silicide etch process and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Deposition shield for a plasma reactor

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With mechanical mask – shield or shutter for shielding workpiece
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Method and apparatus for etching a semiconductor wafer with feat

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Method and apparatus for etching a semiconductor wafer with...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Profile ID: LFUS-PAI-P-360185

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