4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Stefan Lanio

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Alpha-type electron energy filter

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Analyzing system and charged particle beam device

Radiant energy – Electron energy analysis
Reexamination Certificate

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Deflection system

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Dynamically compensated objective lens-detection device and...

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
Reexamination Certificate

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Electron beam lens

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Profile ID: LFUS-PAI-P-339436

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