Electron beam lens

Details Electron beam lens Electron beam lens

1998-07-09

2000-08-22

Ham, Seungsook

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

250396R, G21K 108, H01J 314, H01J 326

Patent

active

061076333

ABSTRACT:
An electron beam lens has a magnetic lens provided with first and second pole pieces for influencing an electron beam and forming a magnetic field between the two pole pieces. A third pole piece is provided, but is not in magnetic contact with the two other pole pieces. The third pole piece is immersed in the magnetic field formed between the first and second pole pieces and extracts a part of such magnetic field. Also disclosed is a cathode lens and an electron beam device for use with such an electron beam lens.

REFERENCES:
patent: 5760550 (1998-06-01), Sukeno et al.
patent: 5780859 (1998-07-01), Feuerbaum et al.
patent: 5895917 (1999-04-01), Ueda et al.
patent: 5929451 (1999-07-01), Kojima et al.

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