Alpha-type electron energy filter

Details Alpha-type electron energy filter Alpha-type electron energy filter

1986-09-12

1988-07-26

Anderson, Bruce C.

Radiant energy

With charged particle beam deflection or focussing

Magnetic lens

3133611, H05B 3126, G21K 108

Patent

active

047602619

ABSTRACT:
An image forming alpha filter having pole pieces with straight edges is disclosed which has good local resolution and very good energy resolution. It includes three deflection regions, which are separated from one another by relatively large interspaces.

REFERENCES:
patent: 4314218 (1982-02-01), Tronc
patent: 4322622 (1982-03-01), Tronc

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