Analyzing system and charged particle beam device

Details Analyzing system and charged particle beam device Analyzing system and charged particle beam device

2006-03-17

2008-10-21

Berman, Jack I (Department: 2881)

Radiant energy

Electron energy analysis

C250S307000, C250S310000, C250S397000

Reexamination Certificate

active

07439500

ABSTRACT:
The present invention relates to an analyzing system with improved detection scheme and a charged particle beam device comprising the same. The analyzing system for analyzing a beam of charged particles has a divider to divide the beam of charged particles according to their energies into a low energy beam and a high energy beam; a front detector for detecting the high energy beam; and at least one reverse detector for detecting the low energy beam. The divider is positioned between the front detector and the at least one reverse detector and the front detector and/or the at least one reverse detector are segmented.

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