4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Steag RTP Systems GmbH

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Apparatus and method for measuring the temperature of...

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Apparatus for the thermal treatment of substrates

Electric heating – Heating devices – Combined with container – enclosure – or support for material...
Reexamination Certificate

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Device and method for aligning disk-shaped substrates

Material or article handling – Article reorienting device
Reexamination Certificate

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Device for thermal treatment of substrates

Heating – Accessory means for holding – shielding or supporting work... – Support structure for heat treating ceramics
Reexamination Certificate

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Method and apparatus device for the heat treatment of...

Heating – Accessory means for holding – shielding or supporting work...
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