4. Metal working
  5. Method of mechanical manufacture
  6. Electrical device making

Simon W. Tam

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Clamping ring apparatus for processing semiconductor wafers

Work holders – Relatively movable jaws – Means to actuate jaw
Patent

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Electrostatic chuck with fluid flow regulator

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Etch chamber

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Patent

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Etch chamber

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Profile ID: LFUS-PAI-P-605484

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