Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
Inventor
active
Accelerometer with improved strain gauge sensing means
Method for making a piezoresistive pressure sensor of semiconduc
Method of making a semiconductor device force and/or acceleratio
Semiconductor device with a piezoresistive pressure sensor
Semiconductor device with force and/or acceleration sensor
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Profile ID: LFUS-PAI-P-1326900