Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1990-12-21
1995-05-09
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
338 2, G01D 1512
Patent
active
054129869
ABSTRACT:
An accelerometer device comprises a silicon semiconductor member having a mass mounted on a support by integral beams extending between the mass and support to permit movement of the mass in response to acceleration. Piezoresistive sensors are accommodated in the beams for sensing strain in the beams during movement of the mass to provide an output signal from the device corresponding to the acceleration. The beams each have an end secured to the support and an end secured to the mass and taper intermediate the beam ends to provide a high and substantially uniform strain throughout the tapered section of the beam. The piezoresistive sensor is accommodated in the tapered beam section to be responsive to that high, uniform strain. Preferably the member has four beams mounting the mass, each beam has a tapered section extending from each end of the beam toward the center of the beam, and each beam section has a piezoresistive sensor accommodated therein to be responsive to the uniform strain within that beam section. The piezoresistive sensors are conveniently interconnected to compensate for off-axis acceleration in one direction by compensation within each leg of a bridge circuit and to compensate for off-axis acceleration in another direction by compensation within the full bridge circuit.
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Beringhause Steven
Hartauer Siegbert
Mandeville Raymond E.
Rolph, III W. Donald
Vilimek Vaclav F.
Baumann Russell E.
Chapman John E.
Donaldson Richard L.
Grossman Rene E.
Texas Instruments Incorporated
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