4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With measuring, sensing, detection or process control means

Shoichiro Matsuyama

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Electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and device for plasma-etching organic material film

Etching a substrate: processes – Gas phase etching of substrate
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Method and device for plasma-etching organic material film

Etching a substrate: processes – Gas phase etching of substrate
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Plasma etching method and plasma etching unit

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Plasma processing apparatus, electrode plate for plasma...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With measuring – sensing – detection or process control means
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