Electrostatic chuck

Details Electrostatic chuck Electrostatic chuck

2007-08-07

2009-11-17

Jackson, Stephen W (Department: 2836)

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

C361S230000, C361S231000, C361S232000, C361S233000, C361S235000

Reexamination Certificate

active

07619870

ABSTRACT:
An electrostatic chuck device includes an electrostatic chuck section including a substrate and a power supply terminal for applying a DC voltage to an electrostatic-adsorption inner electrode; and a metal base section fixed to the other main surface of the electrostatic chuck section. Here, a concave portion is formed in the main surface of the metal base section facing the electrostatic chuck section and a dielectric plate is fixed to the concave portion. The dielectric plate and the electrostatic chuck section are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric plate and the concave portion are adhesively bonded to each other with an insulating adhesive bonding layer interposed therebetween. The dielectric constant of the insulating adhesive bonding layer is smaller than that of any one of the dielectric plate and the substrate.

REFERENCES:
patent: 6028762 (2000-02-01), Kamitani
patent: 6134096 (2000-10-01), Yamada et al.
patent: 6483690 (2002-11-01), Nakajima et al.
patent: 7525787 (2009-04-01), Dhindsa et al.
patent: 2005/0276928 (2005-12-01), Okumura et al.
patent: 2004-363552 (2004-12-01), None

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