4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. Using film of etchant between a stationary surface and a...

Shijian Li

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Article for polishing semiconductor substrates

Abrading – Abrading process – With tool treating or forming
Reexamination Certificate

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Articles for polishing semiconductor substrates

Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate

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Barrier layer buffing after Cu CMP

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Chemical mechanical polishing a substrate having a filler...

Abrading – Precision device or process - or with condition responsive... – With indicating
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Chemical mechanical polishing a substrate having a filler...

Abrading – Abrading process – Utilizing fluent abradant
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Profile ID: LFUS-PAI-P-464521

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