Abrading – Abrading process – With tool treating or forming
Reexamination Certificate
2006-03-21
2006-03-21
Thomas, David B. (Department: 3723)
Abrading
Abrading process
With tool treating or forming
C451S533000
Reexamination Certificate
active
07014538
ABSTRACT:
A method and apparatus for using fixed abrasive polishing pads that contain posts for chemical mechanical polishing (CMP). The posts have different shapes, different sizes, different heights, different materials, different distribution of abrasive particles and different process chemicals. This invention also includes preconditioning fixed abrasive articles comprising a plurality of posts so that the posts have equal heights above the backing to achieve a uniform texture. This invention relates to improvements with respect to in situ rate measurement (ISRM) devices. The invention resides in providing a mechanical means, such as a notch, to determine when approaching the end of the abrasive web roll. The invention resides in coding the web throughout its length to enable determining the location of different portions of the web. This invention resides in providing perforations in the sides or end of the web for improved handling.
REFERENCES:
patent: 1601642 (1926-09-01), Parker
patent: 1927162 (1933-09-01), Fiedler et al.
patent: 2112691 (1938-03-01), Crowder
patent: 2240265 (1941-04-01), Nachtman
patent: 2392687 (1946-01-01), Nachtman
patent: 2431065 (1947-11-01), Miller
patent: 2451341 (1948-10-01), Jemstedt
patent: 2453481 (1948-11-01), Wilson
patent: 2454935 (1948-11-01), Miller
patent: 2456185 (1948-12-01), Grube
patent: 2457510 (1948-12-01), van Omum
patent: 2458676 (1949-01-01), Brenner et al.
patent: 2461556 (1949-02-01), Lorig
patent: 2473290 (1949-06-01), Millard
patent: 2477808 (1949-08-01), Jones
patent: 2479323 (1949-08-01), Davis
patent: 2480022 (1949-08-01), Hogaboom
patent: 2490055 (1949-12-01), Hoff
patent: 2495695 (1950-01-01), Camin et al.
patent: 2500205 (1950-03-01), Schaefer
patent: 2500206 (1950-03-01), Schaefer et al.
patent: 2503863 (1950-04-01), Bart
patent: 2506794 (1950-05-01), Kennedy et al.
patent: 2509304 (1950-05-01), Klein
patent: 2512328 (1950-06-01), Hays
patent: 2517907 (1950-08-01), Mikulas
patent: 2519945 (1950-08-01), Twele et al.
patent: 2530677 (1950-11-01), Berkenkotter et al.
patent: 2535966 (1950-12-01), Teplitz
patent: 2536912 (1951-01-01), Cobertt
patent: 2539898 (1951-01-01), Davis
patent: 2540175 (1951-02-01), Rosenqvist
patent: 2544510 (1951-03-01), Prahl
patent: 2549678 (1951-04-01), Flandt
patent: 2554943 (1951-05-01), Farmer
patent: 2556017 (1951-06-01), Vonada
patent: 2560534 (1951-07-01), Adler
patent: 2560966 (1951-07-01), Lee
patent: 2569577 (1951-10-01), Reading
patent: 2569578 (1951-10-01), Rieger
patent: 2571709 (1951-10-01), Gray
patent: 2576074 (1951-11-01), Nachtman
patent: 2587630 (1952-03-01), Konrad et al.
patent: 2619454 (1952-11-01), Zapponi
patent: 2633452 (1953-03-01), Hogaboom, Jr. et al.
patent: 2646398 (1953-07-01), Henderson
patent: 2656283 (1953-10-01), Fink et al.
patent: 2656284 (1953-10-01), Toulmin
patent: 2657177 (1953-10-01), Rendel
patent: 2657457 (1953-11-01), Toulmin
patent: 2673836 (1954-03-01), Vonada
patent: 2674550 (1954-04-01), Dunlevy et al.
patent: 2675348 (1954-04-01), Greenspan
patent: 2680710 (1954-06-01), Kenmore et al.
patent: 2684939 (1954-07-01), Geese
patent: 2686859 (1954-08-01), Gray et al.
patent: 2689215 (1954-09-01), Bart
patent: 2695269 (1954-11-01), de Witz et al.
patent: 2698832 (1955-01-01), Swanson
patent: 2706173 (1955-04-01), Wells et al.
patent: 2706175 (1955-04-01), Licharz
patent: 2708445 (1955-05-01), Manson et al.
patent: 2710834 (1955-06-01), Vrilakas
patent: 2711993 (1955-06-01), Lyon
patent: 3162588 (1964-12-01), Bell
patent: 3334041 (1967-08-01), Dyer et al.
patent: 3433730 (1969-03-01), Kennedy et al.
patent: 3448023 (1969-06-01), Bell
patent: 3476677 (1969-11-01), Corley et al.
patent: 3607707 (1971-09-01), Chenevier
patent: 3873512 (1975-03-01), Latanision
patent: 3942959 (1976-03-01), Markoo et al.
patent: 3992178 (1976-11-01), Markoo et al.
patent: 4047902 (1977-09-01), Wiand et al.
patent: 4082638 (1978-04-01), Jumer
patent: 4119515 (1978-10-01), Costakis
patent: 4125444 (1978-11-01), Inoue
patent: 4312716 (1982-01-01), Maschler et al.
patent: 4523411 (1985-06-01), Freerks
patent: 4704511 (1987-11-01), Miyano
patent: 4713149 (1987-12-01), Hoshino
patent: 4752371 (1988-06-01), Kreisel et al.
patent: 4772361 (1988-09-01), Dorsett et al.
patent: 4793895 (1988-12-01), Kaanta et al.
patent: 4839993 (1989-06-01), Masuko et al.
patent: 4934102 (1990-06-01), Leach et al.
patent: 4954141 (1990-09-01), Takiyama et al.
patent: 4956056 (1990-09-01), Zubatova et al.
patent: 5011510 (1991-04-01), Hayakawa et al.
patent: 5014468 (1991-05-01), Ravipati et al.
patent: 5061294 (1991-10-01), Harmer et al.
patent: 5066370 (1991-11-01), Andreshak et al.
patent: 5096550 (1992-03-01), Mayer et al.
patent: 5108463 (1992-04-01), Buchanan
patent: 5136817 (1992-08-01), Tabata et al.
patent: 5137542 (1992-08-01), Buchanan et al.
patent: 5152917 (1992-10-01), Pieper et al.
patent: 5203884 (1993-04-01), Buchanan et al.
patent: 5217586 (1993-06-01), Datta et al.
patent: 5225034 (1993-07-01), Yu et al.
patent: 5257478 (1993-11-01), Hyde et al.
patent: 5328716 (1994-07-01), Buchanan
patent: 5437754 (1995-08-01), Calhoun
patent: 5453312 (1995-09-01), Haas et al.
patent: 5454844 (1995-10-01), Hibbard et al.
patent: 5472371 (1995-12-01), Yamakura et al.
patent: 5478435 (1995-12-01), Murphy et al.
patent: 5527424 (1996-06-01), Mullins
patent: 5534106 (1996-07-01), Cote et al.
patent: 5543032 (1996-08-01), Datta et al.
patent: 5560753 (1996-10-01), Schnabel et al.
patent: 5562529 (1996-10-01), Kishii et al.
patent: 5567300 (1996-10-01), Datta et al.
patent: 5575706 (1996-11-01), Tsai et al.
patent: 5578362 (1996-11-01), Reinhardt et al.
patent: 5595527 (1997-01-01), Appel et al.
patent: 5605760 (1997-02-01), Roberts
patent: 5624300 (1997-04-01), Kishii et al.
patent: 5633068 (1997-05-01), Ryoke et al.
patent: 5654078 (1997-08-01), Ferronato
patent: 5674122 (1997-10-01), Krech
patent: 5692950 (1997-12-01), Rutherford et al.
patent: 5702811 (1997-12-01), Ho et al.
patent: 5725417 (1998-03-01), Robinson
patent: 5738574 (1998-04-01), Tolles et al.
patent: 5743784 (1998-04-01), Birang et al.
patent: 5779521 (1998-07-01), Muroyama et al.
patent: 5804507 (1998-09-01), Perlov et al.
patent: 5807165 (1998-09-01), Uzoh et al.
patent: 5810964 (1998-09-01), Shiraishi
patent: 5820450 (1998-10-01), Calhoun
patent: 5823854 (1998-10-01), Chen
patent: 5823855 (1998-10-01), Robinson
patent: 5840190 (1998-11-01), Scholander et al.
patent: 5840629 (1998-11-01), Carpio
patent: 5842910 (1998-12-01), Krywanczyk et al.
patent: 5846882 (1998-12-01), Birang
patent: 5868605 (1999-02-01), Cesna
patent: 5871392 (1999-02-01), Meikle et al.
patent: 5882491 (1999-03-01), Wardle
patent: 5893796 (1999-04-01), Birang et al.
patent: 5899745 (1999-05-01), Kim et al.
patent: 5904615 (1999-05-01), Jeong et al.
patent: 5911619 (1999-06-01), Uzoh et al.
patent: 5913713 (1999-06-01), Cheek et al.
patent: 5916010 (1999-06-01), Varian et al.
patent: 5938801 (1999-08-01), Robinson
patent: 5944583 (1999-08-01), Cruz et al.
patent: 5948697 (1999-09-01), Hata
patent: 5951380 (1999-09-01), Kim
patent: 5958794 (1999-09-01), Bruxvoort et al.
patent: 5985090 (1999-11-01), Kikuta et al.
patent: 5985093 (1999-11-01), Chen
patent: 6001008 (1999-12-01), Fujimori et al.
patent: 6004880 (1999-12-01), Liu et al.
patent: 6012968 (2000-01-01), Lofaro
patent: 6017265 (2000-01-01), Cook et al.
patent: 6020264 (2000-02-01), Lustig et al.
patent: 6022264 (2000-02-01), Cook et al.
patent: 6024630 (2000-02-01), Shendon et al.
patent: 6033293 (2000-03-01), Crevasse et al.
patent: 6056851 (2000-05-01), Hsich et al.
patent: 6066030 (2000-05-01), Uzoh
patent: 6069080 (2000-05-01), James et al.
patent: 6074284 (2000-06-01), Tani et al.
patent: 6077337 (2000-06-01), Lee
patent: 6080215 (2000-06-01), Stubbs et al.
patent: 6090239 (2000-07-01), Liu et al.
patent: 6093085 (2000-07-01), Yellitz et al.
patent: 6103096 (2000-08-01), Datta et al.
patent: 6106382 (2000-08-01), Sakaguchi
patent: 6106661 (2000-08-01), Raeder et al.
patent: 6116998 (2000-09-01), Damgaard et al.
patent: 6120349 (2000-09-01), Nyui et al.
patent: 6121143 (2000-09-01), Messner et al.
patent: 61
Birang Manoocher
Emami Ramin
Li Shijian
Rosenberg, legal representative Sandra L.
Scales Marty
Applied Materials Inc.
Patterson & Sheridan
Thomas David B.
LandOfFree
Article for polishing semiconductor substrates does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Article for polishing semiconductor substrates, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Article for polishing semiconductor substrates will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3533754