Abrading – Flexible-member tool – per se – Interrupted or composite work face
Reexamination Certificate
2006-06-13
2006-06-13
Wilson, Lee D. (Department: 3723)
Abrading
Flexible-member tool, per se
Interrupted or composite work face
C451S005000, C451S287000
Reexamination Certificate
active
07059948
ABSTRACT:
Methods, articles of manufacture, and apparatus are provided for depositing a layer, planarizing a layer, or combinations thereof, a material layer on a substrate. In one embodiment, an article of manufacture is provided for polishing a substrate, comprising a polishing article having a polishing surface, a plurality of passages formed through the polishing article for flow of material therethrough, and a plurality of grooves disposed in the polishing surface. The article of manufacture may be used in a processing system. The article of manufacture may be used in a method for processing a substrate, comprising positioning the substrate in an electrolyte solution containing a polishing article, optionally depositing a material on the substrate by an electrochemical deposition method, and polishing the substrate with the polishing article.
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Chen Llang-Yuh
Duboust Alain
Li Shijian
Applied Materials
Grant Alvin J.
Patterson and Sheridan
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