4. Semiconductor device manufacturing: process
  5. Coating of substrate containing semiconductor region or of...
  6. Insulative material deposited upon semiconductive substrate

Sheng-Wen Chen

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Method and system for reducing wafer edge tungsten residue...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Method for cleaning a plasma enhanced CVD chamber

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Method for fabricating a surface acoustic wave device

Metal working – Piezoelectric device making
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Oxygen plasma reduction to eliminate precursor overflow in...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Surface acoustic wave device and method for fabricating the...

Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
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Profile ID: LFUS-PAI-P-2273900

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