Method for fabricating a surface acoustic wave device

Details Method for fabricating a surface acoustic wave device Method for fabricating a surface acoustic wave device

2007-11-21

2011-10-04

Tugbang, A. Dexter (Department: 3729)

Metal working

Piezoelectric device making

C029S846000, C216S099000

Reexamination Certificate

active

08028389

ABSTRACT:
A novel surface acoustic wave device with a decreased velocity dispersion and a low insertion loss as well as the fabrication method therefore is provided. The surface acoustic wave device includes a substrate, an insulating layer with an indentation on the substrate, a silicon layer divided by an etched window with a first portion on the insulating layer and a second portion suspended above the indentation, a piezoelectric layer on the first and the second portions of the silicon layer, and at least an electrode on the piezoelectric layer.

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