Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
Inventor
active
High-Q micromechanical resonator devices and filters...
MEMS vibrating structure using a single-crystal...
MEMS vibrating structure using a single-crystal...
Micromechanical structures having a capacitive transducer...
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Profile ID: LFUS-PAI-P-2158049