Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-03-01
2011-10-11
San Martin, Jaydi (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S328000, C257S414000
Reexamination Certificate
active
08035280
ABSTRACT:
The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer having domain inversions, which determine certain vibrational characteristics of the MEMS vibrating structure. The MEMS vibrating structure may have dominant lateral vibrations or dominant thickness vibrations. The single-crystal piezoelectric thin-film layer may include Lithium Tantalate or Lithium Niobate, and may provide MEMS vibrating structures with precise sizes and shapes, which may provide high accuracy and enable fabrication of multiple resonators having different resonant frequencies on a single substrate.
REFERENCES:
patent: 6909221 (2005-06-01), Ayazi et al.
patent: 7250705 (2007-07-01), Dewa et al.
patent: 7492241 (2009-02-01), Piazza et al.
patent: 7586239 (2009-09-01), Li et al.
patent: 7626846 (2009-12-01), Rao et al.
patent: 7639105 (2009-12-01), Ayazi et al.
patent: 7750759 (2010-07-01), Lee et al.
patent: 7898158 (2011-03-01), Li et al.
patent: 2004/0125472 (2004-07-01), Belt
patent: 2010/0237709 (2010-09-01), Hall et al.
Batchko, Robert G. et al., “Backswitch Poling in Lithium Niobate for High-Fidelity Domain Patterning and Efficient Blue Light Generation,” Applied Physics Letters, Sep. 1999, pp. 1673-1675, vol. 75, No. 12, American Institute of Physics.
Brown, Paul T. et al., “Control of Domain Structures in Lithium Tantalate Using Interferometric Optical Patterning,” Optics Communications, May 15, 1999, pp. 310-316, vol. 163, Elsevier Science B.V.
Chen, Yan-Feng et al., “High-Frequency Resonance in Acoustic Superlattice of Periodically Poled LiTaO3,” Appl. Phys. Lett., Feb. 1997, pp. 592-594, vol. 70, American Institute of Physics.
Courjon, E. et al., “Pure Longitudinal Plate Mode Excited by Poled Domains Transducers on LiNbO3,” Proceedings, EFTF*IEEE-FCS'07, May 29-Jun. 1, 2007, pp. 1073-1076, IEEE.
Ho, Gavin K. et al., “High-Order Composite Bulk Acoustic Resonators,” Technical Digest, IEEE Int. Conf. on Micro Electro Mechanical Systems, Jan. 21-25, 2007, pp. 791-794, IEEE.
Kondo, Jungo et al., “High-Speed and Low-Driving-Voltage Thin-Sheet X-Cut LiNbO3 Modulator with Laminated Low-Dielectric-Constant Adhesive,” IEEE Photonics Technology Letters, Oct. 2005, pp. 2077-2079, vol. 17, No. 10, IEEE.
Kumar, A. K. Sarin et al., “High-Frequency Surface Acoustic Wave Device Based on Thin-Film Piezoelectric Interdigital Transducers,” Applied Physics Letters, Sep. 2004, pp. 1757-1759, vol. 85, No. 10, American Institute of Physics.
Myers, L. E. et al., “Quasi-Phase-Matched Optical Parametric Oscillators in Bulk Periodically Poled LiNbO3,” J. Opt. Soc. Am. B, Nov. 1995, pp. 2102-2116, vol. 12, No. 11, Optical Society of America.
Ostrovskii, I. V. et al., “Free Vibration of Periodically Poled Ferroelectric Plate,” Journal of Applied Physics, 2006, pp. 114106-1 to 114106-6, vol. 99, No. 114106, American Institute of Physics.
Osugi, Yukihisa et al., “Single Crystal FBAR with LiNbO3 and LiTaO3 Piezoelectric Substance Layers,” International Microwave Symposium (IEEE-MTT-S'07), Jun. 3-8, 2007, pp. 873-876, IEEE.
Pastureaud, Thomas et al., “High-Frequency Surface Acoustic Waves Excited on Thin-Oriented LiNbO3 Single-Crystal Layers Transferred onto Silicon,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Apr. 2007, pp. 870-876, vol. 54, No. 4, IEEE.
“Soitec Innovative Process for Materials Treatments—Smart Cut(R),” 2007, Soitec.
Stephanou, P. J. et al., “GHz Contour Extensional Mode Aluminum Nitride MEMS Resonators,” Proceedings, IEEE Ultrasonics Symposium, Oct. 2-6, 2006, pp. 2401-2404, IEEE.
Stephanou, P. J. et al., “GHz Higher Order Contour Mode AIN Annular Resonators,” Technical Digest, IEEE 20th Int. Conf. on Micro Electro Mechanical Systems, 2007, IEEE.
Yamada, M. et al., “First-Order Quasi-Phase Matched LiNbO3 Waveguide Periodically Poled by Applying an External Field for Efficient Blue Second-Harmonic Generation,” Appl. Phys. Lett. 1993, pp. 435-436, vol. 62, No. 5, American Institute of Physics.
Yong-Yuan Zhu et al., “Crossed Field Excitation of an Acoustic Superlattice,” J. Phys. D: Appl. Phys., 1996, pp. 185-187, vol. 29, No. 1, IOP Publishing Ltd.
Yong-Yuan Zhu et al., “Ultrasonic Excitation and Propagation in an Acoustic Superlattice,” J. Appl. Phys., Aug. 1992, pp. 904-914, vol. 72, No. 3, American Institute of Physics.
Notice of Allowance mailed Oct. 28, 2010 regarding U.S. Appl. No. 12/263,883 now U.S. Patent No. 7,898,158.
Bhattacharjee Kushal
Lee Seung-bae
Li Sheng-Shian
Martin Jaydi San
RF Micro Devices, Inc.
Withrow & Terranova, P.L.L.C.
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