Electrical generator or motor structure – Non-dynamoelectric – Piezoelectric elements and devices
Reexamination Certificate
2011-03-01
2011-03-01
SanMartin, J. (Department: 2837)
Electrical generator or motor structure
Non-dynamoelectric
Piezoelectric elements and devices
C310S320000, C310S321000
Reexamination Certificate
active
07898158
ABSTRACT:
The present invention relates to a micro-electro-mechanical systems (MEMS) vibrating structure supported by a MEMS anchor system, and includes a single-crystal piezoelectric thin-film layer having domain inversions, which determine certain vibrational characteristics of the MEMS vibrating structure. The MEMS vibrating structure may have dominant lateral vibrations or dominant thickness vibrations. The single-crystal piezoelectric thin-film layer may include Lithium Tantalate or Lithium Niobate, and may provide MEMS vibrating structures with precise sizes and shapes, which may provide high accuracy and enable fabrication of multiple resonators having different resonant frequencies on a single substrate.
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Bhattacharjee Kushal
Lee Seung-bae
Li Sheng-Shian
RF Micro Devices, Inc.
SanMartin J.
Withrow & Terranova, P.L.L.C.
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