Wave transmission lines and networks – Coupling networks – Electromechanical filter
Reexamination Certificate
2007-11-13
2007-11-13
Takaoka, Dean (Department: 2817)
Wave transmission lines and networks
Coupling networks
Electromechanical filter
C333S199000
Reexamination Certificate
active
11040766
ABSTRACT:
High-Q micromechanical resonator devices and filters utilizing same are provided. The devices and filters include a vibrating polysilicon micromechanical “hollow-disk” ring resonators obtained by removing quadrants of material from solid disk resonators, but purposely leaving intact beams or spokes of material with quarter-wavelength dimensions to non-intrusively support the resonators. The use of notched support attachments closer to actual extensional ring nodal points further raises the Q. Vibrating micromechanical hollow-disk ring filters including mechanically coupled resonators with resonator Q's greater than 10,000 achieve filter Q's on the order of thousands via a low-velocity coupling scheme. A longitudinally mechanical spring is utilized to attach the notched-type, low-velocity coupling locations of the resonators in order to achieve a extremely narrow passband.
REFERENCES:
patent: 5537083 (1996-07-01), Lin et al.
patent: 6686807 (2004-02-01), Giousouf et al.
patent: 6985051 (2006-01-01), Nguyen et al.
Nguyen, Clark T.-C., Vibrating RF MEMS for Next Generation Wireless Applications, Proceedings, 2004 IEEE Custom Integrated Circuits Conference, Orlando, Florida, Oct. 3-6, 2004, pp. 257-264.
Abidi, Asad A., Direct-Conversion Radion Transceivers for Digital Communications, IEEE J. Solid-State Circuits, vol. 30, No. 12, Dec. 1995, pp. 1399-1410.
Yue, C. Patrick, et al., On-Chip Spiral Inductors with Patterned Ground Shields for Si-Based RF IC's, IEEE J. of Solid-State Circuits, vol. 33, No. 5, May 1998, pp. 743-752.
Nguyen, Clark T.-C., Transceiver Front-End Architectures Using Vibrating Micromechanical Signal Processors, Digest of Papers, Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Sep. 12-14, 2001, pp. 23-32.
Huang, Xue Ming Henry, et al., Nanodevice Motion at Microwave Frequencies, Nature, vol. 421, Jan. 30, 2003, pp. 496.
Vig, John R., et al., Noise in Microelectromechanical System Resonators, IEEE Trans Utrason, Ferroelec. Freq. Contr. vol. 46, No. 6, Nov. 1999, pp. 1558-1565.
Wang, Jing, et al., Self-Aligned 1.14-GHZ Vibrating Radial-Mode Disk Resonators, Digest of Technical Papers, Transducers 2003, Boston, Massachusetts, Jun. 8-12, 2003, pp. 947-950.
Bircumshaw, Brian, et al., The Radial Bulk Angular Resonator: Towards A 50Ω RF MEMS Filter, Digest of Technical Papers, Transducers 2003, Boston, Massachusetts, Jun. 8-12, 2003, pp. 875-878.
Abdelmoneum, Mohamed A., et al., Stemless Wine-Glass-Mode Disk Micromechanical Resonators, Proceedings, 16thInt. IEEE MEMS Conf., Kyoto Japan, Jan. 19-23, 2003, pp. 698-701.
Wang, Jing, et al., 1.51-Ghz Nanocrystalline Diamond Micromechanical Disk Resonator With Material-Mismatched Isolating Support, Proceedings, 17thInt. IEEE MEMS Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 641-644.
Clark, John R., et al., Parallel-Resonator HF Micromechanical Bandpass Filters, Digest of Technical Papers, Transducers '97, Chicago, Illinois, Jun. 16-19, 1997, 1997, pp. 1161-1164.
Demirci, M.U., et al., Mechanically Corner-Coupled Square Microresonator Array for Reduced Series Motional Resistance, Digest of Technical Papers, Transducers '03, Boston, Massachusetts, Jun. 8-12, 2003, pp. 955-958.
Iula, Antonio, et al., A Model for the Theoretical Characterization of Thin Piezoceramic Rings, IEEE Transactions on Ultrasonic, Ferroelectrics, and Frequency Control, vol. 43, No. 3, 1996, pp. 370-375.
Bannon, Frank D., et al., High-Q HF Microelectromechanical Filters, IEEE J. Solid-State Circuits, vol. 35, No. 4, Apr. 2000, pp. 512-526.
Navid, Reza, et al., Third-Order Intermodulation Distortion in Capacitively-Driven CC-Beam Micromechanical Resonators, Technical Digest, 14thInt. IEEE MEMS Conf., Interlaken, Switzerland, Jan. 21-25, 2001, pp. 228-231.
Wong, Ark-Chew, et al., Micromechanical Mixer+Filters, Technical Digest, IEEE Int. Electron Devices Meeting, San Francisco, California, Dec. 6-9, 1998, pp. 471-474.
International Search Report And Written Opinion of The International Searching Authority for corresponding International application PCT/US//05/02076.
Shirator, Norihiko, et al., Temperature Characteristic Compensation of a Miniature Bi-Axial Gyro-Sensor Using a Disk-Type Resonator, Japanese Journal of Applied Physics, vol. 38, Part 1, No. 9B, Sep. 1999, pp. 5586-5591.
House R.N., et al., An Analytic Study of the Vibrating Free Disk, IRE Transactions on Ultrasonics Engineering, National Ultrasonics Symposium, Stanford, California, Aug. 17, 1959, 76-84.
Oh, Sang-Kyoung, et al., A Study on The Skipping of Compact Disk Player, IEEE Transactions on Consumer Electronics, vol. 38, No. 3, Aug. 1992, pp. 208-213.
Li Sheng-Shian
Nguyen Clark T.-C.
Brooks & Kushman P.C.
Takaoka Dean
The Regents of the University of Michigan
LandOfFree
High-Q micromechanical resonator devices and filters... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with High-Q micromechanical resonator devices and filters..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and High-Q micromechanical resonator devices and filters... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3856118