Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
Inventor
active
Integration of pre-S/D anneal selective nitride/oxide...
Integration of pre-S/D anneal selective nitride/oxide...
Method for forming a metal silicide
MOS device and process having low resistance silicide...
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Profile ID: LFUS-PAI-P-2228140