4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Sharmin Sadoughi

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Borderless contact architecture

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate

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In situ deposition of a nitride layer and of an...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Integrated circuit device with stress reduction layer

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Isolation scheme based on recessed locos using a sloped Si etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Method and structure for isolating integrated circuit...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Recessed oxide by localized oxidation
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Profile ID: LFUS-PAI-P-581389

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