4. Coating apparatus
  5. Gas or vapor deposition

Seungho Oh

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Deposition of silicon-containing films from hexachlorodisilane

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
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Low temperature formation of patterned epitaxial Si...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
Reexamination Certificate

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Low temperature formation of patterned epitaxial Si...

Semiconductor device manufacturing: process – Formation of semiconductive active region on any substrate
Reexamination Certificate

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Micro-feature fill process and apparatus using...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Sequential deposition process for forming Si-containing films

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Profile ID: LFUS-PAI-P-1338910

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