4. Radiant energy
  5. Electrically neutral molecular or atomic beam devices and...

Seiji Samukawa

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Beam processing apparatus

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
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Beam source and beam processing apparatus

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Beam source and beam processing apparatus

Radiant energy – Electrically neutral molecular or atomic beam devices and...
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Dry etching method and production method of magnetic memory...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Etching method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
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Profile ID: LFUS-PAI-P-178554

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