4. Radiation imagery chemistry: process, composition, or product th
  5. Radiation modifying product or process of making
  6. Radiation mask

Sean D. Burns

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Characterizing films using optical filter pseudo substrate

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
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Dual exposure track only pitch split process

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Graded spin-on organic antireflective coating for...

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Low refractive index polymers as underlayers for...

Synthetic resins or natural rubbers -- part of the class 520 ser – Synthetic resins – Mixing of two or more solid polymers; mixing of solid...
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Method for removing residues from a patterned substrate

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Profile ID: LFUS-PAI-P-2178859

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