Characterizing films using optical filter pseudo substrate

Details Characterizing films using optical filter pseudo substrate Characterizing films using optical filter pseudo substrate

2008-01-17

2011-12-20

Menz, Laura (Department: 2813)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S065000, C356S620000

Reexamination Certificate

active

08080849

ABSTRACT:
A system and method of characterizing a parameter of an ultra thin film, such as a gate oxide layer. A system is disclosed that includes a structure having a pseudo substrate positioned below an ultra thin film, wherein the pseudo substrate includes an optical mirror for enhancing an optical response; and a system for characterizing the ultra thin film by applying a light source to the ultra thin film and analyzing the optical response.

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