4. Data processing: generic control systems or specific application
  5. Specific application, apparatus or process
  6. Robot control

Santiago del Puerto

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Lithography tool having a vacuum reticle library coupled to...

Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate

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Lithography tool having a vacuum reticle library coupled to...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Robot control
Reexamination Certificate

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Method and apparatus for cooling a reticle during...

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Reexamination Certificate

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Method and apparatus for managing actinic intensity...

Optical: systems and elements – Mirror – Including specified control or retention of the shape of a...
Reexamination Certificate

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Method and apparatus for managing actinic intensity...

Optical: systems and elements – Mirror – With support
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2788789

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