Photocopying – Projection printing and copying cameras – Detailed holder for original
Reexamination Certificate
2006-06-06
2006-06-06
Black, Thomas G. (Department: 3661)
Photocopying
Projection printing and copying cameras
Detailed holder for original
C700S246000, C700S250000, C700S257000, C355S132000, C414S217000
Reexamination Certificate
active
07057711
ABSTRACT:
A lithography tool includes an exposure chamber and a reticle handler that exchanges a reticle being exposed as prescribed by the user of the lithography tool. The reticle handler can include a vacuum-compatible robot, a vacuum chamber to house the robot, a load-lock to input reticles and transition them from atmospheric pressure to vacuum, a processing station for processing the reticle, and a reticle library for storing at least one extra reticle so that it is quickly available for exchange during an exposure process. The robot can have a two or more handed gripper to simultaneously hold multiple reticles. This allows a first reticle to be removed from the reticle stage with a first hand and a second reticle to be loaded onto the reticle stage with a second hand, and so on, which minimizes exchange time.
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del Puerto Santiago
Eurlings Markus F. A.
ASML Holding N.V.
Black Thomas G.
Marc McDieunel
Sterne, Kessler, Goldstein & Fox P.L.L.C
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