Method and apparatus for managing actinic intensity...

Details Method and apparatus for managing actinic intensity... Method and apparatus for managing actinic intensity...

2006-02-07

2006-02-07

Chang, Audrey (Department: 2872)

Optical: systems and elements

Mirror

With support

C359S350000, C359S359000, C359S838000, C359S846000, C359S871000

Reexamination Certificate

active

06994444

ABSTRACT:
An apparatus and method of maintaining a time-constant heat load on a lithography mirror. The mirror includes a resistive layer formed on a substrate, contacts for coupling a power supply to the resistive layer, an insulating sublayer formed on the resistive layer, a polished layer formed on the insulating layer, and a reflective layer formed on the polished layer. The time-constant heat load on the lithography mirror is maintained by placing an additional electrical heat load on the mirror according to the actinic heat load transmitted by the mask. Maintaining the time-constant heat load can reduce or eliminate variation in image distortion that occurs as a result of changes in actinic heat load on the lithography mirror. Independent temperature control can be used to mitigate “cold-edge effect.”

REFERENCES:
patent: 3686473 (1972-08-01), Shim et al.
patent: 4253739 (1981-03-01), Carlson
patent: 4422725 (1983-12-01), Prewo
patent: 6634760 (2003-10-01), Folta et al.
patent: 290722 (1991-06-01), None
patent: WO 96/05637 (1996-02-01), None
European Search Report issued Oct. 14, 2003, for European Patent Application No. 03013654.3, 4 pages.
Sato, S., et al., “High heat load vacuum ultraviolet mirror development in Japan,” Optical Engineering 34(2):377-386 (Feb. 1995).
Temperature Sensors, Instruments, Flexible Heaters, and Flex-Circuits from Minco, from http://www.minco.com/, Minco Products, Inc., 4 pages (Dec., 2001).

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