Optical: systems and elements – Mirror – Including specified control or retention of the shape of a...
Reexamination Certificate
2007-01-16
2007-01-16
Shafer, Ricky D. (Department: 2872)
Optical: systems and elements
Mirror
Including specified control or retention of the shape of a...
C359S848000, C359S883000, C219S219000, C219S476000, C219S483000, C374S179000
Reexamination Certificate
active
11169009
ABSTRACT:
An apparatus and method for mitigating a cold edge effect within a lithography mirror is presented. The apparatus includes a heated annular zone formed on a substrate and a heated optical aperture zone formed on the heated annular zone, where each zone includes a resistive layer, and where the resistive layer of at least one zone is produced such that electrical conductivity varies by increasing from the center of the resistive layer to the periphery of the resistive layer. A wiring layer in each zone includes an insulating sublayer and contacts for coupling to a power supply. A time-constant heat load on the lithography mirror is maintained by placing additional electrical heat loads on the mirror according to the actinic heat load on the mirror. Maintaining the time-constant heat load can reduce or eliminate variation in image distortion that occurs as a result of changes in the actinic heat load.
REFERENCES:
patent: 3686473 (1972-08-01), Shim et al.
patent: 4253739 (1981-03-01), Carlson
patent: 4422725 (1983-12-01), Prewo
patent: 4540251 (1985-09-01), Yau et al.
patent: 5904874 (1999-05-01), Winter
patent: 5990449 (1999-11-01), Sugiyama et al.
patent: 6634760 (2003-10-01), Folta et al.
patent: 6994444 (2006-02-01), del Puerto
patent: 2908167 (1980-09-01), None
patent: DD 290 722 (1991-06-01), None
patent: 63-161403 (1988-07-01), None
patent: WO 96/05637 (1996-02-01), None
European Search Report for European Patent Application No. 03013654.3, dated Oct. 14, 2003, 4 pages.
Sato, S., et al., “High heat load vacuum ultraviolet mirror development in Japan,” Optical Engineering, 34(2):377-386 (Feb. 1995).
Temperature Sensors, Instruments, Flexible Heaters, and Flex-Circuits from Minco, from http://www.minco.com, Minco Products, Inc., 4 pages (Dec. 2001).
English language abstract of German Patent No. DD 290 722, issued Jun. 6, 1991, 3 pages.
ASML Holding N.V.
Shafer Ricky D.
LandOfFree
Method and apparatus for managing actinic intensity... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method and apparatus for managing actinic intensity..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for managing actinic intensity... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3764698