4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Sanh D. Tang

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Capacitor constructions

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate

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Capacitor constructions, methods of forming bitlines, and...

Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Reexamination Certificate

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Contact structure and contact liner process

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Cross diffusion barrier layer in polysilicon

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Cross diffusion barrier layer in polysilicon

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate

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Profile ID: LFUS-PAI-P-207297

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