4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Combined with the removal of material by nonchemical means

Sang-Yong Kim

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Apparatus for drying substrate and method thereof

Fluent material handling – with receiver or receiver coacting mea – Plural materials – material supplies or charges in a receiver
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Apparatus for drying substrate and method thereof

Fluent material handling – with receiver or receiver coacting mea – Plural materials – material supplies or charges in a receiver
Reexamination Certificate

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Cleaning solution and cleaning method of a semiconductor device

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Cleaning solution and cleaning method of a semiconductor device

Cleaning compositions for solid surfaces – auxiliary compositions – Cleaning compositions or processes of preparing – For cleaning a specific substrate or removing a specific...
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Cleaning solution and method for selectively removing layer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
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Profile ID: LFUS-PAI-P-1807996

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