4. Measuring and testing
  5. Speed, velocity, or acceleration
  6. Angular rate using gyroscopic or coriolis effect

Sang-woo Lee

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Apparatus and method for driving MEMS structure and...

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Isolation in micromachined single crystal silicon using deep...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Total dielectric isolation
Reexamination Certificate

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MEMS gyroscope having mass vibrating vertically on substrate

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect
Reexamination Certificate

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Method for fabricating vertical offset structure

Semiconductor device manufacturing: process – Making device or circuit responsive to nonelectrical signal
Reexamination Certificate

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Method of forming metal wiring layer of semiconductor device

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Profile ID: LFUS-PAI-P-2686958

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