4. Electricity: measuring and testing
  5. Measuring, testing, or sensing electricity, per se
  6. Using radiant energy

Sang-Mun Chon

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Additive composition, slurry composition including the same,...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Additive composition, slurry composition including the same,...

Compositions – Etching or brightening compositions
Reexamination Certificate

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Composition for removing photoresist and method of forming a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Etching composition, method of preparing the same, method of...

Compositions – Etching or brightening compositions – Inorganic acid containing
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Method and apparatus for detecting a photolithography...

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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