4. Semiconductor device manufacturing: process
  5. Including control responsive to sensed condition
  6. Optical characteristic sensed

Sandra Hyland

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Method and apparatus for improved baffle plate

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method of etching high aspect ratio features

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of forming a dual damascene structure utilizing a...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of forming a semiconductor device using double...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2508020

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