4. Coating processes
  5. Centrifugal force utilized

Sahng Kyoo Lee

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Deposition method of TiN thin film having a multi-layer...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method for fabricating semiconductor wafers

Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies
Patent

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Method for forming interlayer insulating film of a semiconductor

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Multiple layers
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Method for preventing moisture from being absorbed into impurity

Coating processes – Centrifugal force utilized
Patent

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Method of depositing thin film and method of manufacturing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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