4. X-ray or gamma ray systems or devices
  5. Specific application
  6. Lithography

Ryo Ohkubo

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Halftone phase shift mask blank, halftone phase shift mask,...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Halftone phase shift mask blank, halftone phase shift mask,...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Halftone-type phase-shift mask blank, and halftone-type...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Method of manufacturing X-ray mask and X-ray mask blank, and...

X-ray or gamma ray systems or devices – Specific application – Lithography
Reexamination Certificate

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Reflective mask blank having a programmed defect and method...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2127963

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