Single-crystal, oriented-crystal, and epitaxy growth processes;
Forming from vapor or gaseous state
Fully-sealed or vacuum-maintained chamber
Inventor
active
Double side polished wafer scratch inspection tool
Double side polished wafer scratch inspection tool
Low micropipe 100 mm silicon carbide wafer
Low micropipe 100 mm silicon carbide wafer
One hundred millimeter high purity semi-insulating single...
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