Double side polished wafer scratch inspection tool

Details Double side polished wafer scratch inspection tool Double side polished wafer scratch inspection tool

2008-01-15

2008-01-15

Nguyen, Tu T (Department: 2886)

Optics: measuring and testing

Inspection of flaws or impurities

Surface condition

Reexamination Certificate

active

07319518

ABSTRACT:
The invention is a method of inspecting a semiconductor wafer surface for scratches. The method includes positioning a semiconductor wafer for illumination by a radiation source and adjacent a background material that will absorb radiation from the radiation source, directing radiation at a surface of the wafer from the radiation source that has a wavelength that will be absorbed by the fundamental absorption of the wafer, filtering or otherwise limiting the radiation to allow only radiation having wavelengths that are absorbed by the fundamental absorption of the wafer to pass, and detecting radiation scattered on the surface of the wafer and filtered, by position, to thereby identify the location of the scratches on the surface of the wafer, while the absorption of the background material prevents other radiation from the source from interfering with the detection of the scratch-scattered radiation.

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Jacques I. Pankove; Optical Processes in Semiconductors, pp. 34-37, Dover Publications, Inc. New York, no date.

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