4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. With measuring, testing, or inspecting

Robert J. Chong

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Advanced process control of the manufacture of an...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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Applying a self-adaptive filter to a drifting process

Data processing: measuring – calibrating – or testing – Measurement system – Performance or efficiency evaluation
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Determining a next tool state based on fault detection...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Determining transmission of error effects for improving...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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Method and apparatus for controlling a fabrication process...

Data processing: generic control systems or specific application – Specific application – apparatus or process – Product assembly or manufacturing
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