4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Richard S. Wise

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Baffle plate design for decreasing conductance lost during preci

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Dual metal and dual dielectric integration for metal high-k...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Reexamination Certificate

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Hard mask process to prevent surface roughness for selective...

Baths – closets – sinks – and spittoons – Tubs – Particular construction or configuration details
Reexamination Certificate

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High-density plasma, organic anti-reflective coating etch...

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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In-situ plasma etch for TERA hard mask materials

Semiconductor device manufacturing: process – Chemical etching – Altering etchability of substrate region by compositional or...
Reexamination Certificate

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