4. Chemistry: electrical and wave energy
  5. Apparatus
  6. Coating, forming or etching by sputtering

Richard S. Muka

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Apparatus and method for batch thermal conditioning of...

Heating – Work feeding – agitating – discharging or conveying... – Removable furnace bottom section or kiln cart
Reexamination Certificate

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Automated wafer buffer for use with wafer processing equipment

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Batchloader for load lock

Material or article handling – Apparatus for moving material between zones having different... – For carrying standarized mechanical interface type
Patent

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Batchloader for substrate carrier on load lock

Material or article handling – Movable rack having superposed – charge-supporting elements,... – Rack moved vertically by elevating means
Patent

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Blackbody radiation source for producing constant planar energy

Radiant energy – Irradiation of objects or material
Patent

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Profile ID: LFUS-PAI-P-84573

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