Batchloader for substrate carrier on load lock

Details Batchloader for substrate carrier on load lock Batchloader for substrate carrier on load lock

1995-07-06

1997-03-04

Keenan, James W.

Material or article handling

Movable rack having superposed, charge-supporting elements,...

Rack moved vertically by elevating means

414940, 414941, B65G 4907

Patent

active

056072767

ABSTRACT:
A system is provided for batch loading semiconductor wafers into a load lock from a portable carrier used for supporting a plurality of the wafers in spaced relationship and transporting them in a particle free environment. The carrier is supported adjacent a load lock chamber which also has a particle free environment. A multilevel end effector associated with the load lock chamber includes a plurality of spaced end effector sets, each set being adapted to support a wafer thereon and aligned with an associated wafer supported in the carrier. The plurality of wafers are engaged and simultaneously retrieved as a grouping, then held in the load lock chamber awaiting further processing. A variety of mechanisms are provided for moving the end effector sets, both elevationally and into and out of the carrier and load lock chamber, and for moving a carrier door and a load lock door between closed, sealed, positions and open positions and to a parked position remote from the region between the carrier and the load lock chamber.

REFERENCES:
patent: 4381965 (1983-05-01), Maher, Jr. et al.
patent: 4674936 (1987-06-01), Bonora
patent: 4674939 (1987-06-01), Maney et al.
patent: 4676709 (1987-06-01), Bonora et al.
patent: 4715921 (1987-12-01), Maher et al.
patent: 4724874 (1988-02-01), Parikh et al.
patent: 4730976 (1988-03-01), Davis et al.
patent: 4739882 (1988-04-01), Parikh et al.
patent: 4802809 (1989-02-01), Bonora et al.
patent: 4815912 (1989-03-01), Maney et al.
patent: 4951601 (1990-08-01), Maydan et al.
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5133284 (1992-07-01), Thomas et al.
patent: 5166884 (1992-11-01), Maney et al.
patent: 5169272 (1992-12-01), Bonora et al.
patent: 5180276 (1993-01-01), Hendrickson
patent: 5364222 (1994-11-01), Akimoto et al.
patent: 5431600 (1995-07-01), Murata et al.
patent: 5435682 (1995-07-01), Crabb et al.

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